Book: Materials Science in Microelectronics II, Second Edition: The effects of structure on properties in thin films
Author: Eugene Machlin
Pages: 228
Format: PDF
Language: English
ISBN10: 0080446396
The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship.
Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following:
Electrical properties
Magnetic properties
Optical properties
Mechanical properties
Mass transport properties
Interface and junction properties
Defects and properties
* Captures the importance of thin films to microelectronic development
* Examines the cause / effect relationship of structure on thin film properties
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